產(chǎn)品詳情
簡單介紹：
STP-iX455 愛德華渦輪分子泵 ISO100K氮氣抽速為 450 ls-1
STP-iX455 愛德華渦輪分子泵 ISO100K具有性磁力軸承和電機驅(qū)動系統(tǒng)
詳情介紹：
概述
STP-iX455 渦輪分子泵具有性磁力軸承和電機驅(qū)動系統(tǒng)，與上一代渦輪泵相比將振動降低了 50%。采用集成的控制器，不需要使用傳統(tǒng)的安裝于機架上的控制器及互連電纜，不需要水冷卻。
此泵的氮氣抽速為 450 ls-1。STP-iX455 極為適合電子顯微鏡、度量學、光刻和其他對振動的應用。
應用
金屬（鋁）、鎢和電介質(zhì)（氧化物）以及多晶硅等離子刻蝕（氯化物、氟化物和溴化物）
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源，射束線泵送端點站
MBE
擴散
光致抗蝕劑脫模
晶體/晶膜生長
晶片檢查
負載鎖真空腔
科學儀器：表面分析、質(zhì)譜分析、電子顯微鏡
高能物理：射束線、加速器
The STP-iX455 turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 1.3x10-10 Torr (8 in. O.D. conflat inlet). With its multi-axis magnetic bearing system contact between the rotor and the remainder of the pump is completely eliminated, effectively producing an unparalleled level of vibration and heat reduction. No frictional contact in the STP-iX455 also reduces wear and enables it to run virtually maintenance free for years. With an integrated controller eliminates the need for a conventional rack mounted controller. This STP-iX455 turbo pump runs so cool it needs no water for cooling. No need for interconnecting cables but you will need a 48VDC external power supply source not provided. (model with power supply is available on this website).
The STP-iX455 has a built in automatic balancing system (ABS), a key feature of 5-axis magnetic drive technology. Sensors in the pump detect imbalance in the rotor motion and respond by adjusting the bearings magnetic fields to permit the rotor to spin on its own inertial axis, reducing vibration sent to the inlet flange. This function of the STP-iX455 works at all rotational speeds to ensure pump safety. All STP series pumps have dry lubricated radial and axial mechanical bearings as backup safety bearings. In the event of total failure of the magnetic bearings, these mechanical bearings will support the rotor and protect the pump.
The STP-iX-455 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.
The STP-iX455 can be used for a variety of applications including but not limited to:
STP-iX455 渦輪分子泵具有性磁力軸承和電機驅(qū)動系統(tǒng)，與上一代渦輪泵相比將振動降低了 50%。采用集成的控制器，不需要使用傳統(tǒng)的安裝于機架上的控制器及互連電纜，不需要水冷卻。
此泵的氮氣抽速為 450 ls-1。STP-iX455 極為適合電子顯微鏡、度量學、光刻和其他對振動的應用。
應用
金屬（鋁）、鎢和電介質(zhì)（氧化物）以及多晶硅等離子刻蝕（氯化物、氟化物和溴化物）
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源，射束線泵送端點站
MBE
擴散
光致抗蝕劑脫模
晶體/晶膜生長
晶片檢查
負載鎖真空腔
科學儀器：表面分析、質(zhì)譜分析、電子顯微鏡
高能物理：射束線、加速器
放射線應用：融合系統(tǒng)、回旋
功能和優(yōu)勢
緊湊型設(shè)計，包括集成的控制器
性自傳感軸承系統(tǒng)
數(shù)字化 5 軸控制
與現(xiàn)有渦輪泵相比振動級別降低了 50%
可以配置為運行腐蝕性制程
自動平衡系統(tǒng) (ABS) 標準
自動減振 (AVR) 標準
列于 UL 中，具有 CE 標記，符合 SEMI® S2
數(shù)據(jù)
| 入口法蘭 | ISO100K |
| 抽速 |
|
| N2 | 300 ls-1 |
| H2 | 300 ls-1 |
| 壓縮比 |
|
| N2 | >108 |
| H2 | >1 x 104 |
| 極限壓力 | 6.5 x 10-6 Pa |
| 大工作壓力 | 1.3 x 10-1 Pa |
| 允許的前級壓力 | 67 Pa |
| 額定速度 | 55000 rpm |
| 啟動時間 | <6 分鐘 |
| 固定位置 | 任何方向 |
| 冷卻方法 | 自然冷卻（加熱和氣體泵送時進行水冷卻或空氣冷卻） |
| 潤滑油 | 不需要 |
| 前級泵 | 240 lmin-1 |
| 泄露磁通量 |
|
| 軸向方向 | <100 m/Gauss |
| 徑向方向 | <100 m/Gauss |
| 環(huán)境溫度范圍 | 0 至 40 °C |
| 存儲溫度范圍 | -25 至 55 °C |
| 重量 | 15 kg |
Edwards STP-iX455 5-axis Magnetic Bearing Turbo-Molecular Pump, ISO100K, LF100 Inlet with Integrated Controller
Edwards PN PT640Z010. For power requirements use an external 48 VDC power supply.
Edwards PN PT640Z010. For power requirements use an external 48 VDC power supply.
The STP-iX455 turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 1.3x10-10 Torr (8 in. O.D. conflat inlet). With its multi-axis magnetic bearing system contact between the rotor and the remainder of the pump is completely eliminated, effectively producing an unparalleled level of vibration and heat reduction. No frictional contact in the STP-iX455 also reduces wear and enables it to run virtually maintenance free for years. With an integrated controller eliminates the need for a conventional rack mounted controller. This STP-iX455 turbo pump runs so cool it needs no water for cooling. No need for interconnecting cables but you will need a 48VDC external power supply source not provided. (model with power supply is available on this website).
The STP-iX455 has a built in automatic balancing system (ABS), a key feature of 5-axis magnetic drive technology. Sensors in the pump detect imbalance in the rotor motion and respond by adjusting the bearings magnetic fields to permit the rotor to spin on its own inertial axis, reducing vibration sent to the inlet flange. This function of the STP-iX455 works at all rotational speeds to ensure pump safety. All STP series pumps have dry lubricated radial and axial mechanical bearings as backup safety bearings. In the event of total failure of the magnetic bearings, these mechanical bearings will support the rotor and protect the pump.
The STP-iX-455 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.
The STP-iX455 can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
