產(chǎn)品詳情
簡單介紹：
STP-iXA3306C 愛德華磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，可將小型電源供給集成到機(jī)載控制器內(nèi)（成熟的 STPiXA3305 系列的新）。
STP-iXA3306C 愛德華磁懸浮渦輪分子泵該泵的高度等于 STP-XA2703/XA3203 的高度，也等于 STP-iXA3305 系列（不帶其電源供給 (iPS-1200)）的高度。 這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
詳情介紹：
概要
STP-iXA3306 系列磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，可將小型電源供給集成到機(jī)載控制器內(nèi)（成熟的 STPiXA3305 系列的新）。
該泵的高度等于 STP-XA2703/XA3203 的高度，也等于 STP-iXA3305 系列（不帶其電源供給 (iPS-1200)）的高度。 這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
用途
金屬（鋁）、鎢和電介質(zhì)（氧化物）以及多晶硅等離子刻蝕（氯化物、氟化物和溴化物）
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源，射束線泵送和站
特性與優(yōu)勢
緊湊型設(shè)計，包括集成的控制器
性自傳感磁力軸承系統(tǒng)
數(shù)字化 5 軸控制
與現(xiàn)有渦輪泵相比振動級別降低了 50%
可以配置為運行腐蝕性制程
The STP iXA3306C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA3306C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA3306C can be used for a variety of applications including but not limited to:
STP-iXA3306 系列磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，可將小型電源供給集成到機(jī)載控制器內(nèi)（成熟的 STPiXA3305 系列的新）。
該泵的高度等于 STP-XA2703/XA3203 的高度，也等于 STP-iXA3305 系列（不帶其電源供給 (iPS-1200)）的高度。 這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
用途
金屬（鋁）、鎢和電介質(zhì)（氧化物）以及多晶硅等離子刻蝕（氯化物、氟化物和溴化物）
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源，射束線泵送和站
特性與優(yōu)勢
緊湊型設(shè)計，包括集成的控制器
性自傳感磁力軸承系統(tǒng)
數(shù)字化 5 軸控制
與現(xiàn)有渦輪泵相比振動級別降低了 50%
可以配置為運行腐蝕性制程
數(shù)據(jù)
| 入口法蘭尺寸 | ISO250F / VG250 / ICF305 |
| 前級抽氣口尺寸 | KF40 |
| 抽速 N2 | 2650 ls-1 |
| 抽速 Ar | 2300 ls-1 |
| 壓縮比 N2/H2 | >108 / 2 x 103 |
| 極限壓力 | 10-7 Pa (10-9 Torr) |
| 允許的前級壓力 | 266 Pa (2 Torr) |
| 大氣流 N2 （僅水冷） | 4000 sccm |
|
|
(6.76 Pam3s-1) |
| 大氣流 Ar （僅水冷） | 2100 sccm |
|
|
(3.55 Pam3s-1) |
| 額定速度 | 27700 rpm |
| 啟動時間 | <10 分鐘 |
| 固定位置 | 任何方向 |
| 輸入電壓 | 200-240 V |
| 大輸入功率（不帶 TMS） | 1500 VA |
| 大輸入功率（帶 TMS） | 1800 VA |
| 重量 | 80 kg |
大氣流適用于在 25 oC 以下的水冷卻溫度下連續(xù)泵送 N2 或 Ar 氣體，并且使用前級泵（10,000 l/min 尺寸）的情況。 它會隨條件變化而變化。
Edwards STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts.
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT820Z020.
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT820Z020.
The STP iXA3306C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA3306C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA3306C can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
